Novellus C1 150mm

Listing description

Product Description

The monitors are missing.
Also missing are the LF generator and some pumps
Vintage: 1994
Wafer Size: 6″
Configuration: PECVD system, 6″
GAS SYSTEM
TEOS Delivery System: Sigma 6,
TEOS Delivery System: Controller: Yes
Doped: Yes (No Cabinet with tool)
Microcontamination Package: Yes
Methane Gas Saver: No
Process Gas Panel: 8 channel
MFC Type: MKS
A1 N2 5L
A2 Si 1L
A3 PH3 1L
A4 B2H6 1L
B1 N2O 10L
B2 NH3 10L
B3 CTF6 20L
B4 O2 20L
VACCUM SYSTEM:
Pneumatic Panel: New Generation
Purge Panel: Soft Start
Loadlock Foreline: With throttle valve
Reactor Foreline:: External Hot
Main Chamber Pump: iQDP80 only (QMB1200 missing)
Load Lock Pump: none (QDP80 missing)
TOP PLATE/PROCESS CHAMBER
Gas Distribution: Complete
RF Distribution: Complete system (Missing LF Generator)
Chamber Ring Assembly: Etch Resistant Quartz
RF Match Network: Trazar
BOTTOM PLATE
RF Isolated TC: Yes
RF Shunt/Heater ISO, Manometer: Yes
TC/Heater AC Assembly: Yes
Heater Block: Notched (Not present on tool)
WAFER SPINDLE ASSEMBLY
Spindle Assy: Minimum contact ceramic
Spindle Indexer Assy: Geneva Drive
LOADLOCK CHAMBER
Loadlock Cassette Door: New Style
Wafer On Paddle Sensor: Yes
Wafer Cooling Station: No
Platform: Non-contact Pin Search
Platform-Cassettes: Used Anodized Aluminum (None present)
WAFER TRANSFER
Robot: Single Arm
ELECTRICAL
Main AC Panel: New Generation
Remote AC Panel: New Generation
Power Supply: Uses New Style (Not Present)
AC Box Pump Wire Configuration: Edwards Pump configuration
AC Box Load Lock Wire Configuration: Edwards Pump configuration
CONTROL SYSTEMS
Instrument Panel: Valve Display Controller (Tylan) Yes
Instrument Panel: Temperature Controller (Eurotherm) Yes
Instrument Panel: Excess Temperature Interlock (MeterMaster) Yes
Instrument Panel: Vaccum Pressure Controller (Hastings) Yes
Instrument Panel: Throttle Valve Pressure Controller (MKS) Yes
Instrument Panel: Throttle Valve Pressure Controller, Heated (Tylan) Yes
Touch Screen System: ELO LCD Touch-missing;
Maintenance Monitor: Monochrome-missing;
Computer: Y2K Pentium
Software: Specify 4.27
Disk Drive: (External) 3.5
SECS/GEM Interface Software: No
Multibus Controller Configuration
Multibus: CPU (Standard, TEOS Option) Yes
Multinus: RAM PCB – Slot 3 Yes
Multibus: Digital I/O #1-Slot 4 Yes
Multibus: Digital I/O #2-Slot 5 No
Multibus: Analog Input-Slot 6 Yes
Multibus: Analog Out #1-Slot 7 Yes
Multibus: Analog Out #2-Slot 8 No
Multibus: Lift Indexer-Slot 10 Yes
Multibus: Rotate Indexer-Slot 11 Yes
Multibus: Extend Indexer-Slot 12 Yes
Terminal Panel: New Generation (150/200)
Water Interlock, Proteus: Yes
Post Process Audible Alarm: Yes
End Point Detection: Single
RF GENERATORS
High Frequency RF Generator: ENI (25N) (OEM-28B)
Low Frequency RF Generator: Not Present (missing ENI PL-2HFN)
Dual Frequency Option: Yes
Remote Signal Cable (CA99): Cable Length (30’) Yes
HF RF Coax (CA57 or CA140): Cable Length (30’) Yes
LF Coax (CA102): Cable Length (30’) Yes
HF Signal Cable (CA96): Cable Length (30’) Yes
LF Signal Cable (CA100): Cable Length (30’) Yes
SKINS/COVERS
Skins: Front Panel Yes
Skins: Side Panel Front Long, Left & Right Yes
Skins: Side Panel Front Top Short, Left & Right Yes
Skins: Side Panel Front Bottom Short, Left & Right Yes
Skins: Side Panel Back (Main AC) Yes
Skins: Rear Panel Option Yes
Skins: Top Panel Yes
Skins: End Point Computer Cover Yes
Skins: Facility Panel Yes
Skins: Foreline Cover Yes

This equipment is located in IE