Novellus C2 INOVA

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Manufacturer Novellus
Model C2 INOVA
Year 2000
Country Russia Russia
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P80628007

Two systems are available for sale.
Used tools, in working order,
currently not in production, warehoused in a fab in Moscow, Russia.
Module: Thin Film
Number of Chambers: 4
Wafer size: 200 mm (8"), notched
Process Application: PVD Cu Barrier Metal
HCM (2xTa, Cu); Damaclean; clamped degas
25 Wfr (Pod) / SMIF LPT2200 (Asyst)
Transfer robot: Bi-symetric arm-set, MAG 7
Ta-Polycold chiller open loop
NESLAB Chiller
Remote service console
Cu-Mydax chiller

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