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Novellus C2 INOVA


Availability: listing already sold

Listing description

Two systems are available for sale.
Used tools, in working order,
currently not in production, warehoused in a fab in Moscow, Russia.
Features:
Module: Thin Film
Number of Chambers: 4
Wafer size: 200 mm (8"), notched
Process Application: PVD Cu Barrier Metal
HCM (2xTa, Cu); Damaclean; clamped degas
25 Wfr (Pod) / SMIF LPT2200 (Asyst)
Transfer robot: Bi-symetric arm-set, MAG 7
Ta-Polycold chiller open loop
NESLAB Chiller
Remote service console
Cu-Mydax chiller
CE-marked

This equipment is located in RU


Please note that this description may have been translated automatically.

Availability: listing already sold

Listing information

Manufacturer Novellus
Model C2 INOVA
Year 2000
Country Russia Russia
Condition Good
Main category PCB and SMT equipment
Subcategory Semiconductor Equipment
ID P80628007

Availability: listing already sold

About the seller

Client type End User
On Kitmondo since 2018
Number of listings 0
Country Russia Russia
Last activity June 29, 2018