Pxfprd Plasmalab 80 Plus

Listing description

Details:
OXFORD PLASMALAB 80 PLUS ICP ETCHER consisting of:

- Model: Plasmalab 80 Plus RIE/ICP
- Single Chamber, non-load locked
- Platen: 200mm diameter
- New Windows 10 Operating Software ($25,000 upgrade included)
- New PLC with latest Oxford Software
- (Qty 2) RFX600 RF Generators
- Leybold D65BCS Rough Pump (professionally rebuilt)
- Adixen ATP400HPC Turbo Pump (professionally rebuilt)
- System Chiller (professionally rebuilt)
- System Dimensions: 23"x40"x59" (LxWxH)
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)

GAS CONFIGURATION:
Gas 1: O2 100sccm
Gas 2: CF4 100sccm
Gas 3: Ar 100sccm
Gas 4: N2 100sccm
Gas 5: N2 100sccm
Gas 6: N2 100sccm

This equipment is located in US