SPTS MPX ICP PRO

Listing description

Details:
SPTS MPX ICP ETCHER consisting of:

- Model: MPX PRO ICP
- Previously used for SiC (Silicon Carbide) Etch Process
- Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers
- Inductively Coupled Plasma Source (ICP)
- Currently Configured for 4"/100mm Wafers
- Capable of processing up to 8"/200mm wafers
- Carousel Load Lock (2-Wafer Carousel)
- Heated Lower Chamber
- Load-Lock Chamber
- Helium Substrate Backside Cooling
- Weighted Clamp
- Edwards IH80 Vacuum Pump (Chamber)
- Alcatel Adixen ACG 28G Vacuum Pump (Load Lock)
- SMC Thermo Chiller
- Electronics Rack
- MKS Spectrum 1.5KW 13.56MHz RF Generator (Source)
- ENI ACG3B 13.56MHz RF Generator (Lower Electrode)
- Leybold MAG 1500 CT Turbo Pump
- System Cables (full set)
- SPTS PRO System Software
- Verity Instruments SD1024F Smart Spectrograph EPD
- User Manuals & Documentation
- All Passwords Needed to Operate the System
- Year of Manufacture: 2011
- Serial Number: MPO691

On Board Gas Box with following Gas Configuration:
- O2 @ 100 SCCM
- C4F8 @ 200 SCCM
- SF6 @ 200
- Ar @ 200 SCCM
- He @ 200 SCCM
- CF4 @ 200 SCCM
- CHF3 @ 100 SCCM
- NF3 @ 200 SCCM

FULLY REFURBISHED:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- A software license may be obtained directly from SPTS
- SPTS does not certify any third party equipment refurbishments
- System components carefully packed, labeled, and professionally crated.

This equipment is located in US