SPTS Primaxx Monarch

Listing description

SPTS PRIMAXX MONARCH 3 HF RELEASE ETCH consisting of:

– Vapour HF Oxide Etcher
– For Anhydrous HF Gas Etching of Oxide
– Currently Configured for 6”/150mm Wafers
– Capable of processing up to 8”/200mm Wafers
– Semi-Automatic 3-Wafer Loader with Load Lock
– Single Process Chamber
– Integrated Panel PC with on-board electronics minimizes cleanroom footprint
– Third generation process chamber has been designed for easy wafer size
changed and maintenance
– Vacuum Pumps (as required)
– User Manuals & Documentation

This equipment is located in IE