STS ASE Multiplex (Advanced Silicon Etcher). Bosch Process

Listing description

• OEM = Surface Technology Systems Limited (AKA: STS)
• Model = MESC Multiplex ICP ASE
• Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
• Description of Process = ASE (Advanced Silicon Etch, Bosch Process)
• Serial = 31143
• Wafer Size = 150mm
o Loader capacity = 2 wafer Carousel
• Chuck Type = Mechanical Weighted Clamp
• Process Gases:
o C4F8 = 300 SCCMS
o SF6 = 600 SCCMS
o O2 = 100 SCCMS
o AR = 100 SCCMS
o MFC’s are Millipore FC2901 Series
• Turbo Pump = Leybold Mag 2000 CT
• RF Generator 1 = ENI ACG-3
• RF Generator 2 = AE RFG 3001 (Advanced Energy)
• Vacuum measurement = MKS Instruments
• Gate Valve = VAT throttling type gate valve
• Slit Valve = VAT Slit Valve
• Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue
• Vacuum Pump Loadlock = Edwards Pump E2M40
• Vacuum Pump Process Module = Edwards Pump IQDP80 w/IQMB250 Blower (Intelligent Quiet Interface)
• Chiller = Affinity, PWG-060K-BE33CBC2
• Support Module = STS Controller Cabinet / AC Breaker Panel

This equipment is located in US


Please note that this description may have been translated automatically.

Listing information

Manufacturer Surface Technology Systems (Sts)
Model Advanced Silicon Etcher (ASE). Multiplex Bosch Process
Year 2001
Country USA USA
Condition Excellent
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P20708003

About the seller

Client type Machinery dealer
On Kitmondo since 2009
Number of listings 3
Country USA USA
Employees 1 - 10
Established 2007
Company description

​​Since 2007 our company has been a recognized leader in providing world-wide sales, service and advanced technical assistance in support of automated systems utilized in the fabrication and produ… read more

​​Since 2007 our company has been a recognized leader in providing world-wide sales, service and advanced technical assistance in support of automated systems utilized in the fabrication and production of multiple manufacturing processes.
Our primary area of expertise is providing complete, comprehensive support for the semiconductor manufacturing industry; as well as the numerous sub-industries that are interdependent on the base process of wafer manufacturing. This includes the production processes related to Hard Disk Drive and Memory Storage Devices, Optics and Laser applications, as well as Solar and other Alternative Energy Technologies...

Last activity Sept. 13, 2022
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