Suss MA8/BA8 Gen3

Listing description

SUSS MA8 / BA8 GEN3 MASK ALIGNER consisting of:

- Model: MA8 / BA8 Gen3
- Manufacturer: Suss MicroTec / Karl Suss
- Configured for Topside and Backside Alignment (BSA)
- Power: 230V, 50/60 Hz
- UV400 Optics (for 365nm and 405nm exposure)
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 1000W Lamphouse
- CIC1200 Power Supply
- Anti-Vibration Table
- Vacuum Chuck: One Chuck included
- Maskholder: One Maskholder included
- Vintage 2013
- Operations Manual and Documentation
- 6 Month Warranty and Specifications Guarantee
- Fully Refurbished by Suss Factory Trained Technician to Meet OEM Specifications!

CLASSONE''S MASK ALIGNER REFURBISHMENT PROCESS consists of:

1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt

This equipment is located in US