SVG DUAL COAT DEVELOP TRACKS SET.
Model: 8836 HPO
Description: SVG 8826/8836 Series Photoresist Coater and Developer (8800 Series Photoresist Coater)
SVG Dual Track Coater and Developer. Process: Send-Prime-Chill-Coat-Bake-Receive, Send-Bake-Chill-Develop-Bake-Receive. System will be refurbished to customer specifications. Currently, the system is set up for 6" can accommodate 8” wafers. The system can be set up with a variety of photoresist pumps.