Tainics - TE3100 new


Last availability: Nov. 11, 2020

Listing description

Manufacturer: TAINICSModel: TE3100Type: ICP Equipment (for GaN Etching)Version: 2 inches and 4 inchCondition: excellentVintage: Jun 2011Sale condition: as is where isQuantity: 1Comments: -Still installed in the fab. -Shut down and powered off. -It can be inspected by appointment. -The equipment is in excellent condition, with no missing parts. -The equipment was lightly used in an R and D environment for around 2-3 years. -The equipment ran 4 inch Sapphire wafers, but other, larger wafer sizes may be possible with this equipment.Please check the pictures below.More specs available on request.2" Wafer No/Tray : 20pcs 4"wafer No/Tray : 5pcs Gas: Cl2 based Cleaning Gas: CF4, O2 Selectivity: ≥0.8 at PRNon Uniformity (%nu): ≤±5%(Mass Production) ≤±3%(Process Test) Advantages: High Throughput & Etching Rate, Good uniformity, Easy handling and a long lifetime of the wafer holder. Wafer Holder No. : TWH-12AC-A


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Last availability: Nov. 11, 2020

Listing information

Manufacturer Tainics
Model TE3100
Year 2011
Country South Korea South Korea
Condition Excellent
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P01111007

Last availability: Nov. 11, 2020

About the seller

Client type Machinery dealer
On Kitmondo since 2019
Number of listings 18
Country Netherlands Netherlands
Employees 101 - 250
Established 2000
Last activity Nov. 24, 2020
Contact Click here

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