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Manufacturer: TAINICSModel: TE3100Type: ICP Equipment (for GaN Etching)Version: 2 inches and 4 inchCondition: excellentVintage: Jun 2011Sale condition: as is where isQuantity: 1Comments: -Still installed in the fab. -Shut down and powered off. -It can be inspected by appointment. -The equipment is in excellent condition, with no missing parts. -The equipment was lightly used in an R and D environment for around 2-3 years. -The equipment ran 4 inch Sapphire wafers, but other, larger wafer sizes may be possible with this equipment.Please check the pictures below.More specs available on request.2" Wafer No/Tray : 20pcs 4"wafer No/Tray : 5pcs Gas: Cl2 based Cleaning Gas: CF4, O2 Selectivity: ≥0.8 at PRNon Uniformity (%nu): ≤±5%(Mass Production) ≤±3%(Process Test) Advantages: High Throughput & Etching Rate, Good uniformity, Easy handling and a long lifetime of the wafer holder. Wafer Holder No. : TWH-12AC-A
This equipment is located in KR
Manufacturer | Tainics |
Model | TE3100 |
Year | 2011 |
Country | South Korea |
Condition | Excellent |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P01111007 |
Client type | Machinery dealer |
On Kitmondo since | 2019 |
Number of listings | 0 |
Country | Netherlands |
Employees | 101 - 250 |
Established | 2000 |
Last activity | March 2, 2023 |