TAZMO SOG COATER CSX2132N

Listing description

TAZMO SOG TOOL
MODEL: CSX2132N

This Equipment is a through processing apparatus of SOG coating to baking, which allows fully automatic formation of films 150mm substrates from cassette to cassette.

This system, in which substrate transfer is performed by a two-hand robot, comes with a standard cup, a cool plate, three bake plates, an aligner, a cooling area, a vacuum dry, and a high temperature low O2 density bake.

This equipment is located in US