Ulvac Satella deposition tool

Listing description

Satella has a multiple independent chamber configuration. It can be used for full-color device production, a difficult application for Solciet. It has a 7-sided transfer chamber, and can support 2 to 4 organic deposition chambers as needed.
It comes with a high-precision mask alignment mechanism for active-matrix full-color devices. It supports substrates of 200 mm in diameter as the standard substrate size.
System was de-installed in working operational condition.

This equipment is located in US