Used 2010 ASM Eagle XP5 PEALD

Price on request
Last availability: unknown - check availability

Listing description

Tool Status: Deinstalled and crated and in storage. (March 2023)

Wafer Size 300 mm

Process PE-ALD System

Software Version Eagle I ASMJ software (Windows embedded XP / OS)

Full set of schematics and configuration available on request.

Process PE-ALD Oxide, HT-SiO/HT-SiN

Hardware Configuration (fab):

Main System ASM PE-ALD System Mainframe 1

Handler System FI: Kawasaki / Vac: JEL 1

Factory Interface FOUP 2

Options System

Others Process Chamber (RC3 / RC4) 2

This equipment is located in DE


Please note that this description may have been translated automatically.
Price on request
Last availability: unknown - check availability

Listing information

Manufacturer ASM
Model Eagle XP5 PEALD
Year 2010
Country Germany Germany
Condition Good
Main category PCB and SMT equipment
Subcategory Semiconductor Equipment
ID P304261114
Price on request
Last availability: unknown - check availability

About the seller

Client type Machinery dealer
On Kitmondo since 2015
Number of listings 58
Country Ireland Ireland
Employees 1 - 10
Established 2015
Company description

TWe are a provider of Used Semiconductor Equipment and Scientific Laboratory Equipment to the Semiconductor Industry, Surface Mount Industry.
Last activity Nov. 28, 2023
Contact Click here

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