Used Disco DAD 560

Listing description

Equipment : Automatic Dicing Saw

Location : In Factory

Application : Dicing/Cutting/Slotting various wafer

Workpiece size ø152.4 (mm)

X-axis
Useable stroke 220 (mm)
Cut speed 0.04~300.00 (mm/s)
Bearing type Air guide 　

Y-axis
Useable stroke 160 (mm)
Indexing step range 0.0001 to 160.0000 (mm)
Position accuracy (cumulative pitch) less than 0.002/160 (mm)
Position accuracy (single pitch) less than 0.001/5 (mm)
Bearing type Linear guide 　

Z-axis
Maximum cutting stroke 33 (mm)
Minimum step 0.0005 (mm)
Repeating accuracy 0.001/5 (mm)
Maximum blade size 76.2 (mm)

Θ-axis Rotation Range 0 to 130 (deg)

Spindle Output 1.5 (kW)
Maximum revolution 30,000 (min-1[rpm])

Applicable Tape Frame MAX 2-6-1 　

Utilities

Power supply 3Phase 200V 　
50-60Hz 　

Power consumption
When processing 0.59 (kW)
During warm-up 0.51 (kW)
Maximum power 3 (kVA)
Air pressure 0.5~0.8[5.0~8.0] (MPa[kgf/cm2])
Air flow rate 250 (L/min(ANR))
Water pressure 0.2~0.4[2~4] (MPa[kgf/cm2])

Water flow rate
Cutting water 5.0 maximum (L/min)
Cooling water more than 2.5 (L/min)
Duct required suction 2.5~5 (m3/min)

Machine size 796W x 850D x 1,615H (mm)
　 (including monitor) 31.3W x 33.5D x 63.6H (inch)
Machine weight 570 (kg)

This equipment is located in KR