Description
Offer Title: SSEC 3302 Resist Removal and Wafer Cleaning Machine
Manufacturer: Ssec
Model: M3302
Technical Condition: Good
Date of Manufacture: August 30, 2005
Power Specifications:
- Voltage: 208 VAC
- Phase: 3PH
- Frequency: 60Hz
- Current: 30 AMP
Key Features:
1. Cleaning by submersion: The wafer is soaked in a mix of solvents for effective cleaning.
2. Fan Spray Processing: Processing includes spray solvents followed by a nitrogen drying stage.
3. Dry-in/Dry-out System: Designed for efficient handling of dry wafers in and out of the system.
4. Proprietary Soak and Spray Technology: Minimizes spray time and chemistry use, resulting in lower cost-of-ownership compared to conventional methods.
5. Enhanced Efficiency: Achieves 100% photoresist and sidewall fluoropolymer removal 5 times faster than spray-only methods.
6. Equal-time Soak Software: Provides precise process control by ensuring each wafer soaks in heated, recirculating solvent adequately.
7. High-pressure Spray: Rapidly removes remaining residue after soaking, ensuring complete cleaning.
8. Significant Time and Chemistry Savings: Soak and spray process takes 88% less time and 77.5% less chemistry than traditional spray-only processes.
This machine is ideal for post DRIE etch TSV cleaning, essential for the reliability of 2.5D and 3D IC devices.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase