Description
SUSS MA6/BA6 MASK ALIGNER
Completely rebuilt from the gound up September 2023
- Model: MA6 / BA6
- Manufacturer: Suss MicroTec
- Wafer Size: Currently configured for 100mm Diameter Wafers.
-includes 100mm backside wafer chuck and proximity mask holder
- Topside (TSA) Alignment
- Backside (BSA) Alignment
- Suss DVM6 Microscope
- Objectives:
- UV400 splitfield Optics (for 365nm and 405nm exposure)
- CIC 500 Power Supply
- Capable of Hard, Soft, Vacuum Contact with proper tooling.
- 350W Lamphouse
- Vibration Isolation Table (for Suss MA6)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase