Description
Wafer/Substrate size: up to 6”/150 diameter
X,Y, Theta Stage
Planarity over 6”: <10 µm
Resolution: 5 µm
Range of movement: 155 x 155 mm
Load stroke Y axis: 90 mm
Z height adjustment range: 10 mm
Z contact/separation stroke: 3 mm
Theta travel (standard): 360°
Theta travel, fine (optional): ±10°
Chuck
Planarity: 3 µm
Vertical rigidity 6”: <15 µm/10 N
ProbeHead Platen
Fixation Type: Vacuum, magnetic, HF
Travel range: 40 mm
Contact/separation stroke: 0.2 mm
Repeatability: 1 µm
Utilities
Vacuum: -0.8 bar
Compressed air: 4 bar
Dimensions & Weight
Width x Depth x Height: 490 x 490 x480mm
Weight: 60 kg
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase