OXFORD PLASMALAB 133 I

Listing description

- Model: Plasmalab 133 ICP
- Inductive Coupled Plasma Source (ICP380)
- Load-locked single chamber (ICP)
- Electrode: 380mm
- Alcatel ATH1300M Maglev Turbo Pump
- Alcatel Adixen ACT 1300M Controller
-Advanced Energy RF Power Generator
- Computer with PC2000
- LCD Monitor, Keyboard, and Mouse
- Alcatel Adixen ADP 122 P Vacuum Pump
- Alcatel CP 40G Vacuum Pump
- Chiller
- EMO Button
- Operations Manual and Documentation
- Offered as Fully Refurbished and meeting Original Specifications.

GAS POD CONFIGURED WITH 6 MFCS consisting of:
1) BCL3 @ 50 SCCM
2) CL2 @ 50 SCCM
3) CH4 @ 100 SCCM
4) O2 @ 200 SCCM
5) AR @ 100 SCCM
6) H2 @ 50 SCCM

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:
- Chamber disassembled for refurbishment
- Chamber received full wet clean
- Chamber o-rings and seals are replaced with brand new
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally
- All corrosive gas lines replaced with brand new
- All Non-corrosive gas lines cleaned
- Vacuum pumps professionally rebuilt
- Turbo pump professionally rebuilt
- Chillers serviced and fully tested
- All wiring/wire harnesses are checked, repaired or replaced if needed
- All liquid and air lines, tubing and fittings checked and replaced if necessary
- Major components disassembled for checkout, servicing, cleaning, and lubricating - parts are repaired or replaced as needed
- Checkout of all electronic and mechanical parts
- Machine covers are cleaned, polished or replaced as needed
- Equipment is fully tested to verify compliance to specifications
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer
- System cycle and repeatability testing completed prior to cover replacement and wipe down
- System components carefully packed, labeled, and professionally crated

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NEW X20 PLC UPGRADE available consisting of:

- Latest X20 PLC Upgrade Kit
- Latest Software Version
- Upgrade performed by Oxford FSE
- New PC running Windows 10
- 17” TFT Monitor, keyboard and mouse

X20 Upgrade Features: Upgrade to the X20 Control system provides a larger bandwidth control system which allows more data to be processed, resulting in extremely accurate control and data logging. All components are modular, allowing fast and easy replacement or repair in the event of failure. This simple, integrated control system provides a robust and compact solution. Installing the X20 Control System allows the latest software to be used and ensures compatibility with all future hardware developments. The current Black and Blue PLC architectures are now no longer manufactured.

This equipment is located in US