Hologenix NGS 3500L

Listing description

Dimensional metrology and defect detection system
Stage Travel: 200mm X 200mm
Brightfield / Darkfield and Nomarski (DIC)
Granite base and Z column
Closed loop linear stages with position feedback
0.05um resolution linear glass encoders
NIKON microscope with 5X, 10X, 20X and 50X objectives (BF and DF)
Tilting ultrawide trinocular viewing head with 10x eyepieces
Hitachi 5MP GrayScale digital camera (Color camera can be substituted)
Windows XP
RMS Vision Systems Software with License

Maximum stage Load capacity: 50 lb
250mm / second maximum staging speed
Granite base and Z-column, stainless steel finish
Class 100 (10 optional) clean room compatible
Closed loop linear stages, with position feedback
from 0.05 um resolution linear glass encoders
Non-linear 2D accuracy error correction
Accuracy U2 (XY): 1.5+0.6L/100 um, U1 (Z):
1.5+3L/100 um. Where L is length in mm
Computer: Windows XP Intel P4 system
Platform: High Perfromance 3000L
Software: NGS 3500L Advanced
Metrology Suite
Optical System: Flat Field objectives, with optional
motorized 5 position turret
Camera: High resolution CCD array 60+db S/N ratio
Image Processing 256 grayscale with 1:5-1:50 subpixel
ratio (Optional 5MP Color)
Video and optional Laser Auto focus
Illumination: software controlled Coaxial & backlight
Environmental: 17-23 deg C, 20-80% Humidity
Electrical 120/240 VAC, 15A single phase

Includes (1) Monitor. Warranty available

This equipment is located in US