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KLA-TENCOR SURFSCAN 6420 DEFECT INSPECTION SYSTEM consisting of:
- Model: Surfscan 6420
- Bare wafer surface defect inspection system
Substrate Size:
- Wafer size capable: 100mm, 125mm, 150mm, & 200mm
- Customer select wafer size at time of order
Substrate Thickness:
- Adjustable up to 12 mm.
- Automatic adjustment within 2 mm range.
Material:
- Any surface that scatters less than 90% of incident light
Defect Sensitivity:
- Most Surfaces: Better than 0.12 um (depending upon surface quality).
- Polished Silicon: Better than 0.12 um at 95% capture rate.
Repeatability Error:
- Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon).
Throughput:
- Up to 120 wafers per hour using 150 mm wafers
- Up to 95 wafers per hour using 200 mm wafers
Contamination:
- Less than 0.5 particles/cm squared greater than 0.15 um diameter per single pass
Cassette Handling:
- Single puck handling from single cassette or platform. Sorting by robot optional.
Illumination Source:
- 30 mW Argon-Ion laser, 488 nm wavelength
Printer:
- New Data Printer
Operating Sofware:
- Windows 98 Operating Software
- Operations Manual and Documentation
- Power: 208V, 1PH, 17A, 60Hz
Refurbished to Factory Specifications consisting of:
- New Laser
- New Power Supply
- Clean or Replace Optics and Mirrors
- System calibrated to OEM specifications
- Optics Alignment
- Email us for full refurbishing process details!
- 6 months warranty and guarantee
This equipment is located in US
Manufacturer | Kla-tencor |
Model | Surfscan 6420 |
Year | - |
Country | USA |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P41029333 |
Client type | Machinery dealer |
On Kitmondo since | 2011 |
Number of listings | 0 |
Country | USA |
Last activity | Aug. 25, 2023 |