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Lam Research TCP 9600

$88,000
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Availability: listing already sold

Listing description

LAM TCP 9600 Metal etcher, 6" clamp chuck

Gas Box
Etch MFC's
Unit 1300 He 50 Sccm
Tylan 2900 M N2 200 Sccm
Tylan 2900 N2 100 Sccm
Unit 1660 Bcl3 200 Sccm
Aera CL2 200 Sccm
DSQ MFC's
Unit 1100 O2 200 Sccm
Unit 1560 A SF6 200 sccm
Unit 1260 A Ar 2 SLM
Back of box MFC's: ASM08008F Helium 30 Liter per Minute
WVDS: (3) Advanced Energy RFG 1250
6" Clamp W/Movable Gap
(3) Alcatel ADS 501 pumps

This equipment is located in KR


Please note that this description may have been translated automatically.
$88,000
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Availability: listing already sold

Listing information

Manufacturer Lam research
Model TCP 9600
Year 1996
Country South Korea South Korea
Condition Good
Main category PCB and SMT equipment
Subcategory Semiconductor Equipment
ID P20612031
$88,000
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Availability: listing already sold

About the seller

Client type Unknown
On Kitmondo since 2012
Number of listings 0
Country South Korea South Korea
Last activity June 12, 2013

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