Ultratech XLS 100 / 35 St

Listing description

ULTRATECH XLS 100 / 35 STEPPER consisting of:

- Currently Setup for 6 Semi Standard Wafers
- Capable of Processing 4 to 8 Wafers
- Stage Type: Linear course motors with final piezo drive, 6 axes of freedom
- Iso-Damp Vibration Control
- Computer Type: VM E Bus Controller, Sun Sparc-5 CPU, Touchscreen Color User Interface
- Cassette-to-Cassette Wafer Handling
- 12 Slot Library with Bar Code Reader Reticle Handling
- Reduction Ratio: 4:1
- Feature Size: 0.35 µ m
- DOF (in 1.02 µm of resist): 0.90 µ m DoF
- Sidewall Profile: >/= 84 degrees
- Field Flatness: < /= 0.30 µ m
- Lens Distortion: 50 nm, 100%, Maximum X or Y Vector
- Largest Square: 22.1 x 22.1 mm
- Exposure Spectrum: 365 nm I-Line
- Exposure Uniformity: ± 1.5%
- Wafer Plane Intensity: 1000 mW /cm 2
- Lamp Type: 1750 Watt, non pulsed, Hg arc Lamp
- Overlay: 90 nm mean + 3s
- Throughput (wph): 65 (150 mm wafers)
- Substrate Type: 6 x 6 x 0.25 inch quartz
- Chrome Type: Antireflective
- Bar Code Standard: USS 39
- Operations Manual and Documentation
- S/N: 2182

This equipment is located in US