Used Ebara FREX 300

Listing description

The tool is fully operational, running Cu on both sides. The auxiliary equipment is a power cabinet and two chillers (one for each side). Chemical dispense systems support the whole fleet so no chemical dispense equipment would be included. We run off of slurry loops under the floor as well as direct chemical distribution from a VMB for the cleaner chemical. The VMB and slurry loop support many tools.

As far as hardware config, there are 4 load-ports, 3 robots, two platens (one on each side). The tool has MPTI top-rings but they are able to be upgraded. The endpoint system is based on temperature.

Wafer Size : 300mm

This equipment is located in TW