Yield Engineering 3TA HMDS Vapor Prime Oven

Listing description

Interior chamber: 12"w x 13.25"d x 12"h
(2) PID Temperature Controllers
25-200ºC
PLD Logic Controller with Touchscreen Display
Granville-Phillips Digital Vacuum Gauge
Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
Overtemp Protection Heater Shut-Off
Preheated Nitrogen to bring wafers rapidly to Operational Temperature
Multi-Program Capability
Chamber Material: Electro-Chemically Polished 316L Stainless Steel
120v, 1ph, 50/60hz, 14amp
Optional: 7CFM vacuum pump, hydrocarbon or fomblin

This equipment is located in US