Glen Technologies R3A Plasma Asher

Listing description

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
Active Plasma for routine cleaning of sample surfaces
RIE Plasma for aggressive cleaning of non ESD sensitive samples
Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes:
ACTIVE PLASMA for routine cleaning of sample surfaces
RIE PLASMA for aggressive cleaning of non-ESD sensitive samples
DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp
Vacuum Pump not included

This equipment is located in US