Suss PM-5 Prober

Listing description

Wafer/Substrate size: up to 6”/150 diameter

X,Y, Theta Stage
Planarity over 6”: <10 µm
Resolution: 5 µm
Range of movement: 155 x 155 mm
Load stroke Y axis: 90 mm
Z height adjustment range: 10 mm
Z contact/separation stroke: 3 mm
Theta travel (standard): 360°
Theta travel, fine (optional): ±10°

Chuck
Planarity: 3 µm
Vertical rigidity 6”: <15 µm/10 N

ProbeHead Platen
Fixation Type: Vacuum, magnetic, HF
Travel range: 40 mm
Contact/separation stroke: 0.2 mm
Repeatability: 1 µm

Utilities
Vacuum: -0.8 bar
Compressed air: 4 bar

Dimensions & Weight
Width x Depth x Height: 490 x 490 x480mm
Weight: 60 kg

This equipment is located in US