ASM EPI Chamber

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Manufacturer Asm
Model EPI Chamber
Year 2010
Country Austria Austria
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P21016006

Process Chamber – 150 R.P. Reduced Pressure
Quartz Glass

New, unused.

Material: Quartz Glass.
Dimensions (ca.): 605x327x260mm (23.82”x12.87”x10.23”).
Opening on side 1 (ca.): 260x22mm (10.24”x0.87”).
Opening on side 2 (ca.): 260x46mm (10.24”x1.81”).

With 5 big and 2 small ribs (7 ribs in sum).
Thickness of the ribs: 5,07 – 5,09 mm (0.200”).


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