Karl Suss Micro MA6

Listing description

Suss Microtech MA6 6 Aligner
The Karl Suss MA6 is a top and bottom side contact printer used for fine lithography down to 1 micron or better. The MA6 is ideal for use with I-line (365 nm) resists. It is capable of processing both 4- and 6inch substrates. After reading this manual, the User should be able to describe a typical MA6 (ksaligner) process for both top and backside alignment, explain the theory of operation, and state all hazards associated with the system. After successfully completing the qualification procedures for this tool (see AAppendix 12.1H), the User should be able to perform a full photolithography process for both TSA and BSA using this sysd and approved (qualified) Users may use tool this.

This equipment is located in US