OKAMOTO Grind-X GNX-300

Manufacturer Okamoto
Model Grind-X GNX-300
Year 2001
Country Ireland Ireland
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P81120053
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Okamoto Grind-X GNX-300P Grinder
(Vintage : 2001, condition : No Missing, but No polisher)

This unit is located in Asia and is stored in Warehouse.
This unit was in working condition before de-install.

Configuration:
Wafer diameter: 8? and 12?
Grinding mode: Continuous down feed
Grinding spindle: 2 axes
Rotation speed: 3,000 rpm maximum
Bearing: air bearing
Motor: 5.5 kW built-in motor
Cooling method: water-cooled
Maximum vertical stroke: 4?
Vertical fast-grind speed: 8? per minute
Grinding speed: 1 to 999 um per minute
Grinder diameter: 12?
Grinding resistance reading: monitoring current, output to CRT
Horizontal angle adjustment: manual
Maximum radial load capacity: 30 kgf
Maximum axial load capacity: 150 kgf
Air consumption: 20 L per minute x 2
Index table:
Number of vacuum chucks: (3)
Vacuum chuck material: porous ceramic
Vacuum chuck rotation motor: 1.0 kW AC servo motor x 3
Vacuum chuck rotation speed: 400 rpm maximum
Chuck bearing: air bearing
Maximum radial load capacity: 30 kgf
Maximum axial load capacity: 150 kgf
Air consumption: 36 L per minute x 3
Auto measuring device:
Wafer thickness measurement method: Two-point in-process gauge
Wafer thickness setting method: final
Wafer thickness displaying range: 1.8 mm
Table cleaning unit:
Cleaning method: water and ceramic ring
Wafer cleaning unit:
Cleaning method: water and brush
Operation panel:
Display method: 15? TFT color touch panel
Power supply:
Input power: 200V +/- 10%, 3 phase, 50 / 60 Hz
Power consumption: 20 kVA
Grounding: ground resistance JIS type 3 100 ohms or lower
Air supply:
Consumption: 160 NL per minute
Pressure: 0.49 to 0.78 MPa
Dew point: -15°C or lower
Oil removal rate: 0.1 PPM W / W
Grinding water
Water used: DI water
Pressure: 0.34 to 0.49 MPa
Flow rate: 10 L per wafer
Cooling water for vacuum pumps and spindles:
Water used: city water
Pressure: 0.19 to 0.49 MPa
Flow rate: 10 NL per minute
Mist separator duct / general exhaust: Exhaust rate:
2 m^3 per minute
Connection: duct hose, 4? outer diameter
Vacuum pump duct / general exhaust:
Exhaust rate: 75/90 m^3 / h, 50 / 60 Hz
Connection: duct hose, 4? outer diameter

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