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OXFORD PLASMALAB 300 RIE / PE ETCHER SYSTEM consisting of:
- Model: 300 RIE / PE (PE Used for Failure Analysis)
- Up to 12/300mm Wafer Capable
- Setup to etch SiO2, Nitrides, or Polymers
- Platen: 380mm diameter
- Adixen ATH 400M Turbo Pump
- HP Computer with Pentium Dual Core Processor
- Generator Frequancy Range: RF (13.56MHz)
- Plasma mode: RIE/PE
- Wafer stage temperature: 0ºC – 80ºC
- Gas Box: 7 gas Lines
- Gas Box with 6 MKS 1179A MFC''s installed
- MFC 1 Gas: CHF3, Range: 100 SCCM
- MFC 2 Gas: CF4, Range: 100 SCCM
- MFC 3 Gas: O2, Range: 50 SCCM
- MFC 4 Gas: AR, Range: 100 SCCM
- MFC 5 Gas: N2, Range: 100 SCCM
- MFC 6 Gas: O2, Range: 200 SCCM
- Blower Box
- CE Marked
- EMO Button
- Chamber Up/Down Selector Switch
- Hoist Up/Down Buttons
- Operations Manuals & System Restore Disk
- Serial Number: 94-219912
- System Power: 208V, 3ph, 50/60Hz, 20A
- Fully refurbished to meet all OEM specifications
- Available for full inspection and demonstration!
REFURBISHED TO MEET OEM SPECIFICATIONS:
- All subassemblies are disassembled, cleaned, serviced, tested, reassembled and adjusted as follows:
- Chamber disassembled and receives full wet clean.
- All Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to OEM and customer specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- Transport locks installed, all system components carefully packed, labeled, and professionally crated.
This equipment is located in US
Manufacturer | Oxford |
Model | Plasmalab 300 R |
Year | - |
Country | USA |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Other Semi Tools |
ID | P50908057 |
Client type | Machinery dealer |
On Kitmondo since | 2011 |
Number of listings | 0 |
Country | USA |
Last activity | Aug. 25, 2023 |