TEL P-8Fully Auto W

Listing description

TEL P-8I Fully Automatic 200mm Wafer Prober

Asset Tag: 187181

TEL is a leading supplier of innovative semiconductor and FPD production equipment worldwide.

Detailed Configuration:

Model Item/TEL P-8
General:
Overall Size
1090mm(X)

965mm(Y)

930mm(Z)
Weight
815kg

Facility Requirement:
Power source

AC: 110 10V

50/60 Hz

AC:220 20V

50/60 Hz
Power Consumption
1.3KVA
Momentary interruption

retention time
50 m/sec
Air Pressure

0.4~0.7Mpa
Air flow rate

18 l/min
Vacuum

-400 to -700mm/Hg
Vacuum flow rate
15 l/min
Environmental Temp
25.3°C
Environmental Humidity
65% (Max)

Wafer Specification:

Diameter
5,6,8 inch
Thickness

150~1000 µm
Weight

110g (Maximum)
Die size

350~75000 µm

Stage:
Contact Accuracy( X,Y axis)
6µm (1995)
Contact Accuracy(Z axis)
5µm (1995)
Z chuck strength
20kg

Deflection Specification
@ 10kg 90mm from center 22µm (vertical)

16µm (horizontal)

Z Acceleration

1.0 G
Z Stroke

95mm (maximum)
Z Probe Range

65.8mm to 93.3mm
Z Velocity

40mm/s (maximum)

XY stage/platen:
Accuracy

Each axis 2µm
XY stroke

118mm(X)

230~-110mm(Y)
Maximum Speed
200 mm/sec
Acceleration

2.2G
X

2.2G
Y

2.2G
Resolution

0.4 µm

Chuck Mechanism
Rotation Range

7.0 degree
Angular Resolution
0.00022 degree

Pre-align Section:
Rotation Speed

360 degree/sec
Alignment accuracy XY
300µm
Theta Accuracy

0.17 degree
Control Resolution
1 degree
Alignment System
LED

Alignment:
Automatic self-teach & align
yes
Temperature Compensation
every wafer

Auto set-up camera:
Bridge camera
Macro mode magnification
0.41
viewing area

15.6 X 11.7mm
Micro mode magnification
17.8
viewing area

0.36 X 0.28mm

DPS Camera:
Resolution
Macro mode magnification
0.8
viewing area

5.85 X 7.8mm
Micro mode magnification
12
viewing area

0.39 X 0.52mm

Display:
Type

TFT LCD touch panel
Position

everything on LCD panel

Parameter storage
Remote set-up option
no
FDD

3.5" 1.6M
HDD

2.5" 352M

System function:
OCR

yes
Cassette map

yes
Real time wafer map
yes

Interface:
GPIB

yes
TTL

yes

Chuck:
Hot chuck

yes
Thermal Chuck

yes
Leakage and Noise
100pA
Residual Capacitance
2000pF

If interested, make me an offer.

This equipment is located in US