Tokyo Electron Lithius

Manufacturer Tokyo Electron
Model Lithius
Year 2005
Country USA USA
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P50825004

TEL Lithius coater/developer toolset. Lithius toolsets are 12" by default. This toolset has an OEM (TEL) installed 12" to 8" conversion. The toolset was modified from the factory to run 8" wafers. The machine is currently configured to run 8" wafers only. We do not have the required parts to modify it back to 12" capability. Modifying it back to 12" capability would require a modification by the OEM (TEL). Machine is available for source inspection at our facility in Austin, TX. Machine is in great condition and ready for installation and operation. We can assist with installation and qualification of the toolset as part of a turn-key package.

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