Veeco FPP5000 Four Po

Listing description

The FPP-5000 semi-automatic 4 point probe simplifies the measurement of resistive properties of semiconductor wafers and resistive films. Direct computation of V/I, sheet or slice resistivity, metalization thickness and P-N type testing. Unit is self-calibrating.
Microprocessor control. Type testing is determined for most semiconductor substrates or layers. Penetration function allows an energy pulse to be applied for the purpose of breaking through thin oxide layers. Instrument accuracy of 0.5% of reading on all readings between 5 milliohm to 5 K ohm. Sheet resistivity in ohm/sq is displayed from 1.1 M ohm/sq to 450 k ohm/sq, slice resistivity in ohm/cm is displayed from
4.19 x 10 minus 2 M ohm-cm to 17.1 k ohm-cm and V/I in ohms from 0.25 M ohms to 99.9 k ohms. No tables, graphs or mechanical calculations are required. Self test circuitry is built into the unit to determine if a fault is present. Unit automatically performs a forward and reverse measurement each time the cover is closed. Molded indexable wafer carrier allows repeatable probe positioning on wafer. Integral light and RFI shielding for high resistivity measurements.Additional measurements can be made without lifting cover by pressing the RETEST button. Simple operation,
just load a wafer and close the lid. Has four selectable displays: Sheet resistivity, V/I, Bulk resistivity of a wafer with a known thickness and Thickness. Plug in probe can be easily replaced Probe up position permits repeatable measurements fully independent of operator force and substrate thickness. Automatically holds last reading until next reading is taken.Automatic correction factors are calculated to compensate for probe tip spacing variations. Operator manual included. Input power of 115/230 VAC, 50/60Hz at about 30 watts. Rugged aluminum housing ensures integrity of probe mechanism.

This equipment is located in US