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LAM TCP9600SE Metal Etcher available for turnkey to include refurb, install and warranty.
Refurb includes upgrade to ESC chuck and software upgrade with Envision.
VDS system is manual type(not autofill type, can not be upgraded)
Wafer Size: 150-200mm
Current Configuration:
Main body set up for 6‘‘ wafer
One process chambers
Configured for metal etching process
One ELL CHAMBER
One DSQ chamber
One APM chamber
Cassette to cassette auto-handing system
150mm STD- chuck
Chuck type: STD-clamp
DSQ HEATER TYPE:paddle
STD-EPD system
STD- BACK HELIUM SYSTEM
STD-HEATER CONTROL SYSTEM (12 CHANNEL)
System type: classic
three RF Generators
ONE TCU:MW TCU
AC rack
Three Dry pumps
This equipment is located in IE
| Manufacturer | LAM |
| Model | TCP9600SE Metal Etcher |
| Year | - |
| Country |
Ireland
|
| Condition | Good |
| Main category | Metalworking Machinery |
| Subcategory | Other Machine Tools |
| ID | P81204006 |
| Client type | Machinery dealer |
| On Kitmondo since | 2015 |
| Number of listings | 58 |
| Country |
Ireland
|
| Employees | 1 - 10 |
| Established | 2015 |
| Company description |
TWe are a provider of Used Semiconductor Equipment and Scientific Laboratory Equipment to the Semiconductor Industry, Surface Mount Industry. |
| Last activity | Nov. 28, 2023 |
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