TEL Unity 2E 855 DD

Listing description

Unity 2e 855 DD ETCH-OXIDE

As Is, Ex Works Asia.

Tool is refurbished, never installed.

Chamber Type: DRM

S/W version: Ver 3.61-Rev 212

Wafer: 200mm Flat

Main Body Type: Wide

Function Test: Fully Refurbished

Module Configuration Remark
Chamber 2- Chamber
Robot Type YASKAWA / Twin Arm
Robot Drive YASKAWA / VS2ATransfer Transfer Chamber
Robot Drive YASKAWA / VOSH Oriental Chamber
Pendlum vlaveVAT VAT / 65046-PH52
Isolation V/V Present
Pressure Guage MKS / 627A-13614-S 0.25Pa
TMP1 SEIKO SEIKI / STP-1303W1
TMP2 SEIKO SEIKI / STP-1303W1
TMP TC N/A
Pump PC1 N/A
Pump TC N/A
Pump CC N/A
TMP Con’t1 SEIKO SEIKI / STP-1303W1
TMP Con’t2 SEIKO SEIKI / STP-1303W1
TMP Con’t TC N/A
Generator1 ENI / OEM-25B-01
Generator2 ENI / OEM-25B-01
Matcher1 ENI / MWD-25LD
Matcher2 ENI / MWD-25LD
Chiller1 SMC INR499-201
Gas 8 LINE STEC / AERA
B.HE(CNT) STEC / SEC-7440
B.HE(EDGE) STEC / SEC-7440

This equipment is located in IE