Lam Research TCP9608SE

Listing description

LAM TCP9608SE Metal Etcher

Tool Status: Offline, in storage
SW Version: E1.5
Main System
Main mini environment Platform x 1, Status: OK
Main CPU & ACDC module x 1, Status: OK
SMIF System
Asyst 2200 indexer built-In x 2, Status: OK
Handler System
Wafer notch alignment with spatula x 1, Status: OK
Harmonic drive with wafer handler x 2, Status: OK
APM slider with shuttle arm x 1, Status: OK

Process Chambers
Ecthing with E-chuck x 1, Status: OK
Stripping x 1, Status: OK
Rinse/spin dry x 1, Status: OK

Other Equipment
loadlock x 2, Status: OK
RF generator 1250W x 3, Status: OK
Manual WVDS controller x 1, Status: OK
Sub Fab Equipment:
Remote AC Box x 1, Status OK

Main chamber
Turbo pump 1000 litre with controller x 1 set
E-chuck x 1 unit
TCP RF Match x 1 unit
Bias RF Match x 1 unit
RF generator x 2 unit
100 sccm CL2 MFC x 1 unit
50 sccm BCL3 MFC x 1 unit
300 sccm O2 MFC x 1 unit
20 sccm N2 MFC x 1 unit
1000 sccm N2 MFC x 1 unit
100 sccm Ar MFC x 1 unit
50 sccm He UPC x 1 unit

Strip chamber
DSQ RF Match x 1 unit
Heater Paddle x 1 unit
RF generator x 1 unit
Manual WVDS controller x 1 unit
2000 sccm O2 MFC x 1 unit
300 sccm N2 MFC x 1 unit
500 sccm H2O MFC with controller x 1 unit

Rinse/Dry
Spin dryer with vacuum chuck x 1 unit

Transport
Integrated SMIF x 2 unit
Wafer notch aligner with spatula x 1 unit
Harmonic arm drive assembly with wafer holder x 2 unit
APM slider assembly with shuttle arm x 1 unit

This equipment is located in IE