Surface Technology Systems (Sts) Advanced Silicon Etcher (ASE). Multiplex Bosch Process

Beschrijving advertentie

• OEM = Surface Technology Systems Limited (ook bekend als: STS)
• Model = MESC Multiplex ICP ASE
• Type = ICP RIE (inductief gekoppeld plasma, reactieve ionenetsing)
• Beschrijving van proces = ASE (Advanced Silicon Etch, Bosch Process)
• Serieel = 31143
• Wafelgrootte = 150 mm
o Laadcapaciteit = 2 wafelcarrousel
• Chuck Type = Mechanische verzwaarde klem
• Procesgassen:
o C4F8 = 300 SCCMS
o SF6 = 600 SCCMS
o O2 = 100 SCCMS
o AR = 100 SCCMS
o MFC's zijn Millipore FC2901 Series
• Turbopomp = Leybold Mag 2000 CT
• RF-generator 1 = ENI ACG-3
• RF-generator 2 = AE RFG 3001 (Advanced Energy)
• Vacuümmeting = MKS Instruments
• Schuifafsluiter = schuifafsluiter van het BTW-smoortype
• Spleetklep = BTW Spleetklep
• Handleidingen = STS MESC Multiplex ICP Operator's en Modular Parts Catalog
• Loadlock vacuümpomp = Edwards-pomp E2M40
• Vacuümpompprocesmodule = Edwards-pomp IQDP80 met IQMB250-ventilator (intelligente stille interface)
• Koelmachine = Affiniteit, PWG-060K-BE33CBC2
• Ondersteuningsmodule = STS-controllerkast / AC-onderbrekerpaneel

This equipment is located in US


Deze beschrijving kan automatisch zijn vertaald.

Informatie advertentie

Fabrikant Surface Technology Systems (Sts)
Model Advanced Silicon Etcher (ASE). Multiplex Bosch Process
Jaar 2001
Land USA USA
Conditie Uitstekend
Hoofdcategorie PCB en halfgeleider
Subcategorie Halfgeleiderapparatuur
ID P20708003

Over de verkoper

Type klant Machinedealer
Op Kitmondo sinds 2009
Aantal advertenties 3
Land USA USA
Werknemers 1 - 10
Gevestigd 2007
Beschrijving bedrijf

​​Since 2007 our company has been a recognized leader in providing world-wide sales, service and advanced technical assistance in support of automated systems utilized in the fabrication and produ… meer lezen

​​Since 2007 our company has been a recognized leader in providing world-wide sales, service and advanced technical assistance in support of automated systems utilized in the fabrication and production of multiple manufacturing processes.
Our primary area of expertise is providing complete, comprehensive support for the semiconductor manufacturing industry; as well as the numerous sub-industries that are interdependent on the base process of wafer manufacturing. This includes the production processes related to Hard Disk Drive and Memory Storage Devices, Optics and Laser applications, as well as Solar and other Alternative Energy Technologies...

Laatste activiteit sep 13, 2022
Contact opnemen Klik hier