PVA Tepla MetroLine M4L Plasma Asher

Listing description

Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.
Chamber: 9″ X 13″ X 20″ Aluminum, with high-conductance KF 40 port, throttle valve, and isolation valve.
Electrodes: 3-shelf with caged electrodes.
Seren RF Generator: 600 watt 13.56 MHz air cooled with automatic impedance matching network.
Display: Color 10.4 inch touch screen for control and monitoring of process parameters, automatic recipes, or manual plasma treatments.
Two user specified gases, with 500 sccm MFCs
Power Requirements: 120- 240 volts, 1ø, 50/60 Hz 30 amps maximum, changeable in the field.
CE Certified

SAFETY AND SECURITY
Electronic and software interlocks
RF power
Pressure
Chamber door open/close
Emergency OFF front and rear of reactor center and on wall box.
Password security for manual and edit modes.
Audible alarms.
Software alarm limits on critical process parameters.
Over-temperature alarm sensor (generator).
Hard-wired RF relay interlocked with process chamber door.
External interlock connection to extend 24 VAC control loop.

THE M4L IS IDEAL FOR:
Plasma surface modification
Plasma cleaning of organic surfaces
Bond strength enhancement
Plasma etch applications
Plasma asher applications
Increased or decreased wettability
Any other plasma system application
The entire bench top system fits in one cabinet, except for the vacuum pump.

This equipment is located in US