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Wafer/Substrate size: up to 6”/150 diameter
X,Y, Theta Stage
Planarity over 6”: <10 µm
Resolution: 5 µm
Range of movement: 155 x 155 mm
Load stroke Y axis: 90 mm
Z height adjustment range: 10 mm
Z contact/separation stroke: 3 mm
Theta travel (standard): 360°
Theta travel, fine (optional): ±10°
Chuck
Planarity: 3 µm
Vertical rigidity 6”: <15 µm/10 N
ProbeHead Platen
Fixation Type: Vacuum, magnetic, HF
Travel range: 40 mm
Contact/separation stroke: 0.2 mm
Repeatability: 1 µm
Utilities
Vacuum: -0.8 bar
Compressed air: 4 bar
Dimensions & Weight
Width x Depth x Height: 490 x 490 x480mm
Weight: 60 kg
This equipment is located in US
Manufacturer | Suss |
Model | PM-5 |
Year | - |
Country | USA |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Wafer & Semi Test Equipment |
ID | P40312049 |
Client type | Machinery dealer |
On Kitmondo since | 2019 |
Number of listings | 50 |
Country | USA |
Last activity | March 14, 2024 |
Contact | Click here |