APPLIED MICROSTRUCTURES INC MVD 100

Listing description

APPLIED MICROSTRUCTURES INC MVD 100
The MVD 100 is a useful tool for depositing monolayers of organosilanes. It can be used to create highly hydrophobic surfaces, antifouling surfaces and biofunctionalized surfaces. A list of the monolayer deposition processes used in the system can be found on the tool’s web page.

The operation of the system is fairly simple. The tool possesses a reaction chamber and 3 vapor delivery lines. Line 1 is dedicated for water vapor which is used in some processes as a catalyst. Line 2 is dedicated to APTMS due to cross contamination concerns. Line 3 is then used for all remaining organosilanes. Each line features a liquid source, an expansion volume connected to a pressure gauge and a set of control valves. During a vapor fill cycle, Valve 1 will open while Valve 2 is shut allowing the vapor to flow from the source to the expansion volume. Once a specified pressure is reached, Valve 1 closes. At this time the Throttle Valve closes and Valve 2 opens, allowing the vapor to flow into the reaction chamber. The vapor remains in the chamber for a specified amount of time and then is pumped away. An O2 plasma source is also connected to the tool for surface preparation purposes.

This equipment is located in US