Research Instruments EUV MBR- MASK METROLOGY

Listing description

MBR - Refletometer

Spectral range measured < 12.5 to > 14.5 nm
Spectral Resolution ≈ 1.7 pm
Measured spot size Typ. 250x100 μm2 --
Measured Signal dynamics > 12 bit ➔ From < 0.01 % to > 60
%
CWL_50 Av. Accuracy: ≤ 3 pm
CWL_50 Precision, 3σ ≤ 1 pm
Peak Reflectivity Av. Accuracy Rpeak ~ 65% ≤ 0.5 % absolute
Peak Reflectivity Precision Rpeak ~ 65%, 3σ ≤ 0.5 %absolute
Peak Reflectivity Av. Accuracy Rpeak ~ 1% ≤ 0.05 % absolute
Peak Reflectivity : Precision Rpeak ~ 1%: ≤ 0.05%: , 3σ ≤ 0.02% absolute

This equipment is located in SG