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For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration.
Configuration:
1) MFC(MASS FLOW CONTROLLER)
GAS NO. GAS MAME MFC SIZE(SCCM) MAKER MODEL
GAS #1 C4F8 50 SAM SFC-1480F
GAS #2 Ar 1000 SAM SFC-1480F
GAS #3 O2 20 SAM SFC-1480F
GAS #4 CHF3 100 SAM SFC-1480F
GAS #5 O2 100 SAM SFC-1480F
GAS #6 CF4 100 SAM SFC-1480F
GAS #7 N2 100 AERA FC-780XC
GAS #8 CF4 ( 0.419 ) 5 AERA FC-780XC
2) AC-2 Controller (MAIN PRESSURE CONTROLLER) APC(Auto Pressure Controller)
ITEMS Maker MODEL Attachment REMARK
APC VAT 61146-PH52-ABM1 OK
VAT 61146-PH52-ABM1 OK
3) Gauge GAUGE
Unit Maker Model Range REMARK
Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC1
Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC2
Baratron MKS 622A01 TDE 1 PA/133.32 TC
4) Load station hardware configuration SYSTEM
Description Maker Model REMARK
1.TMP MITSBISHI FT-1200W
MITSBISHI FT-1200W
2.TMP Controller MITSBISHI FT-1200W
MITSBISHI FT-1200W
3. ROBOT YASKAWA VS2C
4.Robot Controller YASKAWA SRC-?017
5. EPD TEL SE-2000
6. UPS
7.Generator PEAL RP-3000-27M PC1 TOP
PEAL LP-2000-800K PC1 BOT
PEAL RP-3000-27M PC2 TOP
PEAL LP-2000-800K PC2 BOT
8.Matcher PEAL M-30AW2VD-27M PC1 TOP
PEAL M-20A2LS-U2-4 PC1 BOT
PEAL M-30AW2VD-27M PC2 TOP
PEAL M-20A2LS-U2-4 PC2 BOT
6)
Function Check SUB MODULE
UNIT MAKER MODEL JUDGE REMARK
1.Dry Pump EDWARD IGX-100L OK CC
EDWARD IL-600 OK TC
EDWARD IH-80 OK PC1
EDWARD IH-80 OK PC2
2.Chiller SMC INR-341-42B1-X134 OK PC1
SMC INR-341-42B-X1134 OK PC2
This equipment is located in IE
Manufacturer | TEL |
Model | U2e-855II |
Year | 2002 |
Country | Ireland |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Semiconductor Equipment |
ID | P81119019 |
Client type | Machinery dealer |
On Kitmondo since | 2015 |
Number of listings | 58 |
Country | Ireland |
Employees | 1 - 10 |
Established | 2015 |
Company description |
TWe are a provider of Used Semiconductor Equipment and Scientific Laboratory Equipment to the Semiconductor Industry, Surface Mount Industry. |
Last activity | Nov. 28, 2023 |
Contact | Click here |