ULTRATECH SAVANNAH G2 ALD

Listing description

ULTRATECH SAVANNAH G2
Atomic Laser Deposition System
Volts: 100-120 VAC
KVA: 1.5KVA-2KVA
HERTZ: 50-60 Hz
The Savannah G2 platform incorporates a wide range of advanced field-upgradable options intended to aid serious researchers in expanding their portfolio of available ALD films, as well as allow them to characterize the films in real time. Among the Savannah G2's array of options, a unique low vapor precursor delivery system has been developed to enable the growth of novel materials including single- and multi-component films from Perovskite, Yttrium, Lithium, and the rare earth families. Additional options such as ellipsometry, Quartz Crystal Microbalance (QCM), and mass spectrometry allow for the simultaneous growth of ALD films and the real-time characterization of the deposition process, all of which are indispensable capabilities for process development and optimization activities.

This equipment is located in US