Description
Aspen 2 Dual ICP Maker : Mattson
Serial number : 925
Application : Asher / Stripper
Model : Aspen 2 ICP
Vintage : 2001
Wafer Size : 6" or 8" ( Configured as customer's request)
Details Configuration :
1. Cassette platform : SMIF
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 18"
6. RF generator : Adtek X 4
7. Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase