Glen R3A Plasma Cleaner with Advanced Energy PE-1000 Power Source Verified seller

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manufacturer Glen Technologies
model R3A
year
location USA US
category Semiconductors - miscellaneous
product id P240314085
language

Specifications

Functionality Other
-------------------
worked hours
hours under power
state good
At local norms ---------
status visible

Description

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
Active Plasma for routine cleaning of sample surfaces
RIE Plasma for aggressive cleaning of non ESD sensitive samples
Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes:
ACTIVE PLASMA for routine cleaning of sample surfaces
RIE PLASMA for aggressive cleaning of non-ESD sensitive samples
DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp
Vacuum Pump not included

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2019
Offers online 66
Last activity July 21, 2025

Description

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
Active Plasma for routine cleaning of sample surfaces
RIE Plasma for aggressive cleaning of non ESD sensitive samples
Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes:
ACTIVE PLASMA for routine cleaning of sample surfaces
RIE PLASMA for aggressive cleaning of non-ESD sensitive samples
DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp
Vacuum Pump not included

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

Functionality Other
-------------------
worked hours
hours under power
state good
At local norms ---------
status visible

About this seller

Client type Reseller
Active since 2019
Offers online 66
Last activity July 21, 2025

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Glen R3A Plasma Cleaner with Advanced Energy PE-1000 Power Source