Description
Yield Engineering 3TA HMDS Vapor Prime Oven
Interior Chamber Dimensions:
- Width: 12 inches
- Depth: 13.25 inches
- Height: 12 inches
Temperature Control:
- (2) PID Temperature Controllers
- Temperature Range: 25-200ºC
Control System:
- PLD Logic Controller with Touchscreen Display
Vacuum System:
- Granville-Phillips Digital Vacuum Gauge
- Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
Safety Features:
- Vacuum and Pressure Interlocks to Ensure Process Integrity
- Nitrogen Pressure Control
- Overtemp Protection with Heater Shut-Off
Operational Efficiency:
- Preheated Nitrogen to Rapidly Bring Wafers to Operational Temperature
- Multi-Program Capability
Chamber Material:
- Electro-Chemically Polished 316L Stainless Steel
Electrical Specifications:
- Voltage: 120v
- Phase: 1ph
- Frequency: 50/60hz
- Current: 14amp
Optional Equipment:
- 7CFM Vacuum Pump (hydrocarbon or Fomblin)
Technical Condition: Good
State: Visible
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase