Specifications

-------------------
worked hours
hours under power
state good
At local norms ---------
status visible

Description

Yield Engineering 3TA HMDS Vapor Prime Oven

Interior Chamber Dimensions:
- Width: 12 inches
- Depth: 13.25 inches
- Height: 12 inches

Temperature Control:
- (2) PID Temperature Controllers
- Temperature Range: 25-200ºC

Control System:
- PLD Logic Controller with Touchscreen Display

Vacuum System:
- Granville-Phillips Digital Vacuum Gauge
- Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel

Safety Features:
- Vacuum and Pressure Interlocks to Ensure Process Integrity
- Nitrogen Pressure Control
- Overtemp Protection with Heater Shut-Off

Operational Efficiency:
- Preheated Nitrogen to Rapidly Bring Wafers to Operational Temperature
- Multi-Program Capability

Chamber Material:
- Electro-Chemically Polished 316L Stainless Steel

Electrical Specifications:
- Voltage: 120v
- Phase: 1ph
- Frequency: 50/60hz
- Current: 14amp

Optional Equipment:
- 7CFM Vacuum Pump (hydrocarbon or Fomblin)

Technical Condition: Good
State: Visible

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Client type Reseller
Active since 2019
Offers online 66
Last activity July 25, 2025

Description

Yield Engineering 3TA HMDS Vapor Prime Oven

Interior Chamber Dimensions:
- Width: 12 inches
- Depth: 13.25 inches
- Height: 12 inches

Temperature Control:
- (2) PID Temperature Controllers
- Temperature Range: 25-200ºC

Control System:
- PLD Logic Controller with Touchscreen Display

Vacuum System:
- Granville-Phillips Digital Vacuum Gauge
- Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel

Safety Features:
- Vacuum and Pressure Interlocks to Ensure Process Integrity
- Nitrogen Pressure Control
- Overtemp Protection with Heater Shut-Off

Operational Efficiency:
- Preheated Nitrogen to Rapidly Bring Wafers to Operational Temperature
- Multi-Program Capability

Chamber Material:
- Electro-Chemically Polished 316L Stainless Steel

Electrical Specifications:
- Voltage: 120v
- Phase: 1ph
- Frequency: 50/60hz
- Current: 14amp

Optional Equipment:
- 7CFM Vacuum Pump (hydrocarbon or Fomblin)

Technical Condition: Good
State: Visible

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase


Specifications

-------------------
worked hours
hours under power
state good
At local norms ---------
status visible

About this seller

Client type Reseller
Active since 2019
Offers online 66
Last activity July 25, 2025

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Yield Engineering 3TA HMDS Vapor Prime Oven